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Proceedings Paper

Two-dimensional differential deposition: figure correction of thin-shell mirror substrates for x-ray astronomy
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Paper Abstract

This paper describes a new variation of the differential deposition/differential erosion technique for mid-frequency surface-height error correction. In our approach, the technique is extended to two dimensions in order to correct surfaceheight errors in thin-shell cylindrical mirror segments with high throughput. We describe the new infrastructure currently being developed to realize this technique, including an LTP system for surface metrology of mid-frequency surfaceheight errors, a new UHV linear stage for precise substrate motion during deposition or erosion, and most crucially, the development of electronically-actuated aperture arrays that are mounted in front of a rectangular magnetron cathode, or a rectangular ion source, in order to modulate the deposition/erosion rate of material in two dimensions, in real-time.

Paper Details

Date Published: 4 September 2015
PDF: 12 pages
Proc. SPIE 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII, 96031H (4 September 2015); doi: 10.1117/12.2188135
Show Author Affiliations
David L. Windt, Reflective X-Ray Optics LLC (United States)
Ray Conley, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 9603:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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