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Proceedings Paper

Dynamic stitching interferometric testing for large optical plane
Author(s): Xin Wu; Te Qi; Linna Zhang; Yingjie Yu
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Paper Abstract

Accurate and efficient measurement method is necessary to improve the testing efficiency for large optical plane. In this paper, a system is proposed for testing large optical plane in the workshop which combined dynamic interferometry with stitching algorithm. The feasibility is vibrated by an optical flat with 200mm×300mm.

Paper Details

Date Published: 21 June 2015
PDF: 4 pages
Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952614 (21 June 2015); doi: 10.1117/12.2188111
Show Author Affiliations
Xin Wu, Shanghai Univ. (China)
Univ. of Huddersfield (United Kingdom)
Te Qi, Shanghai Univ. (China)
Linna Zhang, Shanghai Univ. (China)
Zhengzhou Univ. (China)
Yingjie Yu, Shanghai Univ. (China)

Published in SPIE Proceedings Vol. 9526:
Modeling Aspects in Optical Metrology V
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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