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Proceedings Paper

Multilayer optics for coherent EUV/X-ray laser sources
Author(s): F. Delmotte; M. Dehlinger; Ch. Bourassin-Bouchet; S. de Rossi; A. Jerome; E. Meltchakov; F. Varnière
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Paper Abstract

After a brief review of recent results achieved at Laboratoire Charles Fabry concerning high reflectivity mirrors, mirrors with enhanced spectral purity and broadband mirrors, we describe a new approach to design high efficiency multilayer mirrors for application on a broad spectral range. The main idea is to use 2 “spacer” materials (Aluminum and Scandium) in combination with a third material (Boron carbide or Silicon Carbide). We present several examples of design optimization using such multilayers. Finally, we show the first preliminary experimental results with Al/Sc/B4C and Al/Sc/SiC multilayers deposited by ion beam sputtering.

Paper Details

Date Published: 22 September 2015
PDF: 9 pages
Proc. SPIE 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, 958907 (22 September 2015); doi: 10.1117/12.2188048
Show Author Affiliations
F. Delmotte, Lab. Charles Fabry, Institut d'Optique, Univ. Paris Sud, CNRS (France)
M. Dehlinger, Lab. Charles Fabry, Institut d'Optique, Univ. Paris Sud, CNRS (France)
Ch. Bourassin-Bouchet, Lab. Charles Fabry, Institut d'Optique, Univ. Paris Sud, CNRS (France)
S. de Rossi, Lab. Charles Fabry, Institut d'Optique, Univ. Paris Sud, CNRS (France)
A. Jerome, Lab. Charles Fabry, Institut d'Optique, Univ. Paris Sud, CNRS (France)
E. Meltchakov, Lab. Charles Fabry, Institut d'Optique, Univ. Paris Sud, CNRS (France)
F. Varnière, Lab. Charles Fabry, Institut d'Optique, Univ. Paris Sud, CNRS (France)


Published in SPIE Proceedings Vol. 9589:
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI
Annie Klisnick; Carmen S. Menoni, Editor(s)

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