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Proceedings Paper

Laser velocimetry for measurement of non-sinusoidal vibration in sub-nanometer scale without lock-in amplifiers
Author(s): How-foo Chen; Rung-Fu Lin; Wei-Lun Chiang
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Paper Abstract

Laser velocimetry capable of measuring nanoscale motion or displacement normal to vibrational surface is always important in industry and scientific applications. However, measurement sensitivity down to sub-nanometer scale is always a challenge, and utilization of lock-in amplifiers is unavoidable. Measurement is then also limited to single-point detection. Here we report a laser Doppler velocimetry capable of non-contact detection in sub-nanometer scale down to sub-Hertz frequency in a Mach-Zehnder configuration without lock-in amplifiers. Environment perturbation in tens of nanometer scale can be removed by empirical mode decomposition. Lack of lock-in amplifiers promises this technology not limited to single-point detection.

Paper Details

Date Published: 20 August 2015
PDF: 8 pages
Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 955612 (20 August 2015); doi: 10.1117/12.2187894
Show Author Affiliations
How-foo Chen, National Yang-Ming Univ. (Taiwan)
National Taiwan Univ. Hospital (Taiwan)
Rung-Fu Lin, National Yang-Ming Univ. (Taiwan)
National Taiwan Univ. Hospital (Taiwan)
Wei-Lun Chiang, National Yang-Ming Univ. (Taiwan)
National Taiwan Univ. Hospital (Taiwan)


Published in SPIE Proceedings Vol. 9556:
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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