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Proceedings Paper

Employing partially coherent, compact gas-discharge sources for coherent diffractive imaging with extreme ultraviolet light
Author(s): J. Bußmann; M. Odstrčil; R. Bresenitz; D. Rudolf; Jianwei Miao; W. S. Brocklesby; D. Grützmacher; L. Juschkin
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Paper Abstract

Coherent diffractive imaging (CDI) and related techniques enable a new type of diffraction-limited high-resolution extreme ultraviolet (EUV) microscopy. Here, we demonstrate CDI reconstruction of a complex valued object under illumination by a compact gas-discharge EUV light source emitting at 17.3 nm (O VI spectral line). The image reconstruction method accounts for the partial spatial coherence of the radiation and allows imaging even with residual background light. These results are a first step towards laboratory-scale CDI with a gas-discharge light source for applications including mask inspection for EUV lithography, metrology and astronomy.

Paper Details

Date Published: 22 September 2015
PDF: 8 pages
Proc. SPIE 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, 95890L (22 September 2015); doi: 10.1117/12.2187852
Show Author Affiliations
J. Bußmann, RWTH Aachen Univ. (Germany)
Forschungszentrum Jülich GmbH (Germany)
M. Odstrčil, Univ. of Southampton (United Kingdom)
Forschungszentrum Jülich GmbH (Germany)
R. Bresenitz, RWTH Aachen Univ. (Germany)
Forschungszentrum Jülich GmbH (Germany)
D. Rudolf, RWTH Aachen Univ. (Germany)
Forschungszentrum Jülich GmbH (Germany)
Jianwei Miao, Univ. of California, Los Angeles (United States)
California NanoSystems Institute (United States)
W. S. Brocklesby, Univ. of Southampton (United Kingdom)
D. Grützmacher, Forschungszentrum Jülich GmbH (Germany)
L. Juschkin, RWTH Aachen Univ. (Germany)
Forschungszentrum Jülich GmbH (Germany)


Published in SPIE Proceedings Vol. 9589:
X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI
Annie Klisnick; Carmen S. Menoni, Editor(s)

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