Share Email Print

Proceedings Paper

MZP design and fabrication for efficient hard x-ray nano-focusing and imaging
Author(s): Christian Eberl; Markus Osterhoff; Florian Döring; Hans-Ulrich Krebs
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Efficient focusing optics are a key ingredient for high-resolution (few nanometer) hard x-ray imaging. In recent years, a combined optical scheme using prefocusing to match the coherent fraction of the synchrotron’s x-ray beam to a high-resolution multilayer zone plate (MZP) has been presented. This scheme allows sub-5 nm focusing of hard x-rays in two dimensions. Nevertheless, the first lenses prepared by pulsed laser deposition of alternating WW and Si layers were limited by a low deposition rate of W and the formation of lots of Si-droplets during film growth. Thus, the material combination has been changed to Ta2O5 and ZrO2, allowing a much faster and more accurate layer growth. Here we present latest developments achieved in both design and fabrication of high-resolution MMZPs: A MZP with a lens diameters of about 15 micrometers, sharp layer interfaces, 5 nm outermost zone widths and a focal length of 0.5 mm. Too increase the focusing efficiency even more, a tilted geometry using a pulled glass fibre was successfully implemented.

Paper Details

Date Published: 26 August 2015
PDF: 9 pages
Proc. SPIE 9588, Advances in X-Ray/EUV Optics and Components X, 958808 (26 August 2015); doi: 10.1117/12.2187788
Show Author Affiliations
Christian Eberl, Georg-August-Univ. Göttingen (Germany)
Markus Osterhoff, Georg-August-Univ. Göttingen (Germany)
Florian Döring, Georg-August-Univ. Göttingen (Germany)
Hans-Ulrich Krebs, Georg-August-Univ. Göttingen (Germany)

Published in SPIE Proceedings Vol. 9588:
Advances in X-Ray/EUV Optics and Components X
Shunji Goto; Christian Morawe; Ali M. Khounsary, Editor(s)

© SPIE. Terms of Use
Back to Top