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Proceedings Paper

Nanoindentation for surface modification of nanofilms
Author(s): A. I. Luchenko; M. M. Melnichenko
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Paper Abstract

In the work it is shown practical use of a scanning tunneling microscope for indentation in the continuous micro- and nano-range. A maximum load of 2.64 cN (and 0.4 cN minimum) was applied on a piezo-scanner to achieve the indentation. The relaxation changes of modified surface by contact method was investigated. It is shown that within a few hours of modification there is clear evidence of inevitable loss of information about the morphology of initially modified area. The possibility of modifying the sample surface by tunneling current was shown. This may enable preparation of the surface for subsequent applications in which it is necessary to reduce the average irregularities of the surface. Nano-objects on the surface of the experimental samples were created by using the developed method.

Paper Details

Date Published: 20 August 2015
PDF: 6 pages
Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 955619 (20 August 2015); doi: 10.1117/12.2187573
Show Author Affiliations
A. I. Luchenko, V.E. Lashkaryov Institute of Semiconductor Physics (Ukraine)
M. M. Melnichenko, National Taras Shevchenko Univ. of Kyiv (Ukraine)

Published in SPIE Proceedings Vol. 9556:
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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