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Proceedings Paper

Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light
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Paper Abstract

Mirrors are key devices for creating various systems in optics. Focusing X-ray and extreme ultraviolet (EUV) light requires mirror surfaces with an extremely high accuracy. The figure of an ellipsoidal mirror is obtained by rotating an elliptical profile, and using such a mirror, soft X-ray and EUV light can be focused to dimensions on the order of nanometers without chromatic aberration. Although the theoretical performance of ellipsoidal mirrors is extremely high, the fabrication of an ideal ellipsoidal mirror remains problematic. Based on this background, we have been working to develop a fabrication system for ellipsoidal mirrors. In this proceeding, we briefly introduce the fabrication process and the soft X-ray focusing performance of the ellipsoidal mirror fabricated using the proposed process.

Paper Details

Date Published: 26 August 2015
PDF: 4 pages
Proc. SPIE 9588, Advances in X-Ray/EUV Optics and Components X, 95880L (26 August 2015); doi: 10.1117/12.2187455
Show Author Affiliations
Hidekazu Mimura, The Univ. of Tokyo (Japan)
Yoshinori Takei, The Univ. of Tokyo (Japan)
Takahiro Saito, The Univ. of Tokyo (Japan)
Takehiro Kume, The Univ. of Tokyo (Japan)
Hiroto Motoyama, The Univ. of Tokyo (Japan)
Satoru Egawa, The Univ. of Tokyo (Japan)
Yoko Takeo, The Univ. of Tokyo (Japan)
Takahiro Higashi, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 9588:
Advances in X-Ray/EUV Optics and Components X
Shunji Goto; Christian Morawe; Ali M. Khounsary, Editor(s)

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