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Proceedings Paper

Structural and electrical properties of N doped SiC nanostructures obtained by TVA method
Author(s): Victor Ciupina; Cristian P. Lungu; Rodica Vladoiu; Gabriel C. Prodan; Stefan Antohe; Corneliu Porosnicu; Iuliana Stanescu; Ionut Jepu; Sorina Iftimie; Marius Belc; Aurelia Mandes; Virginia Dinca; Eugeniu Vasile; Valeriu Zarovski; Virginia Nicolescu; Aureliana Caraiane
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Paper Abstract

Ionized nitrogen doped Si-C thin films at 200°C substrate temperature were obtained by Thermionic Vacuum Arc (TVA) method. To increase the energy of N, C and Si ions, -400V, -600V and -1000V negative bias voltages was applied on the substrate. The 400nm, 600nm and 1000nm N-SiC coatings on glass was deposed. To characterize the structure of as-prepared N-SiC coatings, Transmission Electron Microscopy (TEM), High Resolution Transmission Electron Microscopy (HRTEM), X-Ray and Photoelectron Spectroscopy (XPS) techniques was performed. Electrical conductivity was measured comparing the potential drop on the structure with the potential drop on a series standard resistance in a constant current mode. To justify the dependence of measured electrical conductivity by the temperature, we assume a thermally activated electrical transport mechanism.

Paper Details

Date Published: 20 August 2015
PDF: 10 pages
Proc. SPIE 9558, Nanostructured Thin Films VIII, 955808 (20 August 2015); doi: 10.1117/12.2187362
Show Author Affiliations
Victor Ciupina, Univ. Ovidius Constanta (Romania)
Academy of Romanian Scientists (Romania)
Cristian P. Lungu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Rodica Vladoiu, Univ. Ovidius Constanta (Romania)
Gabriel C. Prodan, Univ. Ovidius Constanta (Romania)
Stefan Antohe, Univ. of Bucharest (Romania)
Corneliu Porosnicu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Iuliana Stanescu, Univ. Ovidius Constanta (Romania)
Ionut Jepu, National Institute for Laser, Plasma and Radiation Physics (Romania)
Sorina Iftimie, Univ. of Bucharest (Romania)
Marius Belc, Univ. Ovidius Constanta (Romania)
Aurelia Mandes, Univ. Ovidius Constanta (Romania)
Virginia Dinca, Univ. Ovidius Constanta (Romania)
Eugeniu Vasile, Univ. Politehnica of Bucharest (Romania)
Valeriu Zarovski, National Institute for Laser, Plasma and Radiation Physics (Romania)
Virginia Nicolescu, CERONAV (Romania)
Aureliana Caraiane, Univ. Ovidius Constanta (Romania)

Published in SPIE Proceedings Vol. 9558:
Nanostructured Thin Films VIII
Akhlesh Lakhtakia; Tom G. Mackay; Motofumi Suzuki, Editor(s)

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