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Proceedings Paper

Influence of wetting states on optical characteristics of Si nanopatterns
Author(s): Minji Gwon; Sujung Kim; Jiaqi Li; Xiumei Xu; Eunsongyi Lee; Dong-Wook Kim; Chang Chen
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Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 955618; doi: 10.1117/12.2187313
Show Author Affiliations
Minji Gwon, Ewha Womans Univ. (Korea, Republic of)
Sujung Kim, Ewha Womans Univ. (Korea, Republic of)
Jiaqi Li, IMEC (Belgium)
KU Leuven (Belgium)
Xiumei Xu, IMEC (Belgium)
Eunsongyi Lee, Ewha Womans Univ. (Korea, Republic of)
The Univ. of Manchester (United Kingdom)
Dong-Wook Kim, Ewha Womans Univ. (Korea, Republic of)
Chang Chen, IMEC (Belgium)
KU Leuven (Belgium)


Published in SPIE Proceedings Vol. 9556:
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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