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Proceedings Paper

Fatigue analysis of chevron structures with Z shape arms
Author(s): Margarita Tecpoyotl Torres; Ramón Cabello Ruiz; J. Gerardo Vera Dimas; J. Alfredo Rodriguez Ramirez; J. Jesus Escobedo Alatorre; Alejandra Ocampo Diaz
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Paper Abstract

Due to the diversity and multiple energy domains involved, Micro-Electromechanical Systems MEMS devices are vulnerable to several mechanical failures such as fatigue. They been widely used in military applications, radio frequency systems, pressure sensors, automotive industry, among several others. Most MEMS devices contain moving parts that are subjected to cyclic loading, which degrade the device´s efficiency. Due to the high importance of MEMS in various applications, it is necessary to know their lifetime to prevent any damage or process discontinuity to which the system is subject. There have been several investigations in particular on the fatigue analysis in presence of cracks, however in terms of lifetime under cycling load, information is not abundant. The fatigue analysis can be performed for characterizing the ability of materials to support many cycles. Some parts of systems are exposed to strong stress level experiences during its usable lifetime, so the analysis must be focused on them. In this paper, a simulated fatigue analysis of classic, Z-shape and optimized chevron with Z shape arms is shown. Simulations are made using Ansys 15.0, to obtain the arms lifetime of the system because they are subjected to greater stresses in the presence of cyclic loading.

Paper Details

Date Published: 26 August 2015
PDF: 10 pages
Proc. SPIE 9553, Low-Dimensional Materials and Devices, 955318 (26 August 2015); doi: 10.1117/12.2187152
Show Author Affiliations
Margarita Tecpoyotl Torres, Univ. Autónoma del Estado de Morelos (Mexico)
Ramón Cabello Ruiz, Univ. Autónoma del Estado de Morelos (Mexico)
J. Gerardo Vera Dimas, Univ. Autónoma del Estado de Morelos (Mexico)
J. Alfredo Rodriguez Ramirez, Univ. Autónoma del Estado de Morelos (Mexico)
J. Jesus Escobedo Alatorre, Univ. Autónoma del Estado de Morelos (Mexico)
Alejandra Ocampo Diaz, Univ. Autónoma del Estado de Morelos (Mexico)

Published in SPIE Proceedings Vol. 9553:
Low-Dimensional Materials and Devices
Nobuhiko P. Kobayashi; A. Alec Talin; M. Saif Islam; Albert V. Davydov, Editor(s)

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