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Proceedings Paper

Design of SiOx slab optical waveguides
Author(s): E. G. Lizarraga-Medina; A. Oliver; G. V. Vázquez; R. Salas-Montiel; H. Márquez
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Paper Abstract

An analysis of the dispersion relation of SiOx submicron optical waveguides in the visible and IR spectral range is presented. Here is considered that the refractive index (n) of SiOx can be tuned in the range from n=1.457-2 for 2>x>1, and a film thickness from 50nm to 1000nm. Starting from the dispersion relation and the distribution of the electric field in the waveguide; cutoff wavelength, cutoff thickness, effective refractive index, effective guide thickness and confinement factor of a selected mode are calculated.

Paper Details

Date Published: 21 August 2015
PDF: 10 pages
Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95560H (21 August 2015); doi: 10.1117/12.2187121
Show Author Affiliations
E. G. Lizarraga-Medina, Ctr. de Investigación Científica y de Educación Superior de Ensenada B.C. (Mexico)
A. Oliver, Univ. Nacional Autónoma de México (Mexico)
G. V. Vázquez, Ctr. de Investigaciones en Óptica, A.C. (Mexico)
R. Salas-Montiel, Lab. de Nanotechnologie et d’Instrumentation Optique (France)
H. Márquez, Ctr. de Investigación Científica y de Educación Superior de Ensenada B.C. (Mexico)


Published in SPIE Proceedings Vol. 9556:
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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