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Proceedings Paper

The design and fabrication of common optical components lithography lens
Author(s): Jiun-Woei Huang
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Paper Abstract

The design and fabrication of common optical components lithography Lens has been carried out for a 1 to 1 stepper. The specification of lens is fulfilled the 3-D lithography system as 2 micron in resolution for 1 inch x 2.8 inches system. The lens has been sophistically designed by dual path in a triplet to reduce the number of components. A single aspherical surface has been applied to reduce the aberration to diffraction limit in lens. The well-made shapes of lens have been suggested. Then, the fabrication of lens has been in the process. Finally, the optical axis of tolerance optical mechanical mountings for lens system in assembly has been analyzed, and valuable for assembly and fabrication.

Paper Details

Date Published: 17 July 2015
PDF: 7 pages
Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95240P (17 July 2015); doi: 10.1117/12.2186932
Show Author Affiliations
Jiun-Woei Huang, National Applied Research Labs. (Taiwan)
National Taiwan Univ. (Taiwan)


Published in SPIE Proceedings Vol. 9524:
International Conference on Optical and Photonic Engineering (icOPEN 2015)
Anand K. Asundi; Yu Fu, Editor(s)

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