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Proceedings Paper

Research on input shaping algorithm for rapid positioning of ultra-precision dual-stage
Author(s): Fazhi Song; Yan Wang; Xinglin Chen; Ping He
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Paper Abstract

As a high-precision servo motion platform, the dual-stage lithographic system uses lots of long-stroke air-bearing linear motors to achieve rapid positioning. Residual vibration, resulting from direct drive, almost zero damping, parallel decoupling structure and high velocity, leads to too long settling time and is one of the key factors in slowing the speed of positioning. To suppress the residual vibration and realize the high positioning precision in shorter settling time, this paper designs feedforward controller with input shaping algorithm for the rotary motor. Traditional input shaper is sensitive to system models and it is very difficult to get the parameters. A parameter self-learning method based on PSO(Particle Swarm Optimization) is proposed in this paper. The simulation of the system is performed by MATLAB/Simulation. The experimental results indicate that the input shaping algorithm proposed in this paper brings about significant reduction in the positioning time of the dual-stage.

Paper Details

Date Published: 20 August 2015
PDF: 7 pages
Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95560P (20 August 2015); doi: 10.1117/12.2186912
Show Author Affiliations
Fazhi Song, Harbin Institute of Technology (China)
Yan Wang, Harbin Institute of Technology (China)
Xinglin Chen, Harbin Institute of Technology (China)
Ping He, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 9556:
Nanoengineering: Fabrication, Properties, Optics, and Devices XII
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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