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Proceedings Paper

Optical processing and recording by scanning near-field optic/atomic force microscope (SNOAM)
Author(s): Kunio Nakajima; Yasuyuki Mitsuoka; Norio Chiba; Hiroshi Muramatsu; Tatsuaki Ataka; Masamichi Fujihira
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Paper Abstract

This paper describes the design and applications to optical processing and recording of a Scanning Near-field Optic/Atomic-force Microscope (SNOAM). A sharpened and bent optical fiber was used as a near-field optical probe as well as an atomic force microscope probe in a vertical vibrating mode. SNOAM provides simultaneous topographical and optical images with high resolution beyond the diffraction limit. As an example of an application to optical processing, near-field exposures have been demonstrated by a SNOAM. We produced pit and line patterns exposed and developed in commercial photoresist film. In the processing mode, the pit and line patterns down to a width of 100 nm have been fabricated on a Si wafer through the Integrated Circuits process.

Paper Details

Date Published: 6 September 1995
PDF: 12 pages
Proc. SPIE 2535, Near-Field Optics, (6 September 1995); doi: 10.1117/12.218691
Show Author Affiliations
Kunio Nakajima, Seiko Instruments, Inc. (Japan)
Yasuyuki Mitsuoka, Seiko Instruments, Inc. (Japan)
Norio Chiba, Seiko Instruments, Inc. (Japan)
Hiroshi Muramatsu, Seiko Instruments, Inc. (Japan)
Tatsuaki Ataka, Seiko Instruments, Inc. (Japan)
Masamichi Fujihira, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 2535:
Near-Field Optics
Michael A. Paesler; Patrick J. Moyer, Editor(s)

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