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Proceedings Paper

Aspheric surface figuring of fused silica using plasma-assisted chemical etching
Author(s): Steven J. Hoskins
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Paper Abstract

OCA Applied Optics has developed and demonstrated a rapid, automated technique for the fuguring of precision aspheric surfaces on fused silica optical elements using plasma assisted chemical etching (PACE) methodology. In this paper we discuss the pre-processing methods and suitable PACE removal depth strategies for fused silica necessary to ensure that final PACE-finished surfaces meet current low-scatter optical standards. We also describe models for aspheric surface figuring using the patented PACE process which account for substrate dielectric losses and other effects and allow us to define the parameters needed to efficiently correct surface figure errors. FInally, we demonstrate the capabilities of the final PACE figuring method on a fused silica test substrate.

Paper Details

Date Published: 6 September 1995
PDF: 11 pages
Proc. SPIE 2542, Optomechanical and Precision Instrument Design, (6 September 1995); doi: 10.1117/12.218668
Show Author Affiliations
Steven J. Hoskins, OCA Applied Optics (United States)


Published in SPIE Proceedings Vol. 2542:
Optomechanical and Precision Instrument Design
Alson E. Hatheway, Editor(s)

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