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Proceedings Paper

Novel integrated silicon micromechanical/optical pressure sensor
Author(s): Zhiyu Wen; Long Fei; Xianxin Zhong; Youli Li
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Paper Abstract

A novel integrated silicon micro-mechanical/optical pressure sensor is presented. Using the standard IC process and the silicon anisotropic etching technology, an optical strip waveguide which functions as the pressure-sensing and optical signal transmitting element, a thin silicon membrane layer and a photoelectric detector are all integrated on a three-dimensional silicon wafer. The sensor's structure, principle of operation, fabrication processes and test results are presented. This novel silicon integrated micro-mechanical/optical pressure sensor which is small, reliable, sensitive, inexpensive and does not need an external electrical supply may have many potential applications. Keywords: pressure sensor, micro-mechanical, thin silicon membrane, optical strip waveguide, anisotropic etching

Paper Details

Date Published: 6 September 1995
PDF: 3 pages
Proc. SPIE 2542, Optomechanical and Precision Instrument Design, (6 September 1995); doi: 10.1117/12.218667
Show Author Affiliations
Zhiyu Wen, Chongqing Univ. (China)
Long Fei, Chongqing Univ. (China)
Xianxin Zhong, Chongqing Univ. (China)
Youli Li, Univ. of California/Santa Barbara (United States)


Published in SPIE Proceedings Vol. 2542:
Optomechanical and Precision Instrument Design
Alson E. Hatheway, Editor(s)

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