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Proceedings Paper

Several designs for ultrahigh-resolution optical positioning components
Author(s): Jianqiang Zhu
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Paper Abstract

In this paper, some design criteria and key points on ultrahigh resolusion positioning corn ponents were discussed, and the material selection for different functional elements were studied in detail. Several typical and special design were advanced with figues illustration.

Paper Details

Date Published: 6 September 1995
PDF: 5 pages
Proc. SPIE 2542, Optomechanical and Precision Instrument Design, (6 September 1995); doi: 10.1117/12.218665
Show Author Affiliations
Jianqiang Zhu, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2542:
Optomechanical and Precision Instrument Design
Alson E. Hatheway, Editor(s)

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