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Proceedings Paper

Aerosol deposited PZT actuated 2D scanner system
Author(s): David R. Schipf; Chao-Ting Chen; Chun-Liang Kuo; Kang-Yu Chu; Wen-Jong Wu; Wei-Chih Wang
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Paper Abstract

A new lead-zirconium-titanate (PZT) actuator design for a micro scanning illuminating device is being developed. The thin PZT film is deposited directly on stainless steel by using an aerosol deposition machine. The aerosol deposition method enables inexpensive, quick, room temperature fabrication while producing high quality PZT films. The presented scanners would be attractive for endoscopic device applications, where inexpensive systems with high resolution would be a move toward disposal endoscopes. The design of this scanning illuminator and fabrication method are presented. Measurements of the PZT layer surface roughness and the aerosol deposited PZT powder particle diameter are presented. Ongoing work and fabrication challenges are discussed.

Paper Details

Date Published: 2 April 2015
PDF: 6 pages
Proc. SPIE 9431, Active and Passive Smart Structures and Integrated Systems 2015, 94313D (2 April 2015); doi: 10.1117/12.2186333
Show Author Affiliations
David R. Schipf, Univ. of Washington (United States)
Chao-Ting Chen, National Taiwan Univ. (Taiwan)
Chun-Liang Kuo, National Taiwan Univ. (Taiwan)
Kang-Yu Chu, National Cheng Kung Univ. (Taiwan)
Wen-Jong Wu, National Taiwan Univ. (Taiwan)
Wei-Chih Wang, Univ. of Washington (United States)
National Taiwan Univ. (Taiwan)
National Cheng Kung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 9431:
Active and Passive Smart Structures and Integrated Systems 2015
Wei-Hsin Liao, Editor(s)

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