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Proceedings Paper

Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope
Author(s): Mingxing Gao; Hongwei Jing; Xuedong Cao; Lin Chen; Jie Yang
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Paper Abstract

When using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized.

Paper Details

Date Published: 7 August 2015
PDF: 7 pages
Proc. SPIE 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 96230N (7 August 2015); doi: 10.1117/12.2186280
Show Author Affiliations
Mingxing Gao, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Hongwei Jing, Institute of Optics and Electronics (China)
Xuedong Cao, Institute of Optics and Electronics (China)
Lin Chen, Institute of Optics and Electronics (China)
Univ. of Chinese Academy of Sciences (China)
Jie Yang, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 9623:
2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Jigui Zhu; Hwa-Yaw Tam; Kexin Xu; Hai Xiao; Sen Han, Editor(s)

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