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Proceedings Paper

Research and validation of key measurement technologies of large aperture optical elements
Author(s): Renhui Guo; Lei Chen; Chao Jiang; Hui Cao; Huiqin Zhang; Binbin Zhou; Le Song
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Paper Abstract

A lot of optical components with large aperture are employed in high-power solid-state laser driver. These optical components are with high requirement on the surface shape, optical homogeneity and stress distribution. In order to test these parameters, different types of interferometers, surface profilers and stress meters from different manufacturers are needed. But the problem is the products from different manufacturers may provide different test results. To solve the problem, the research and verification of the key measurement technologies of large aperture optical components are carried out in this paper. The absolute flatness and optical homogeneity measurement methods are analyzed. And the test results of different interferometric software are compared. The test results from different surface profilers and stress meters are also compared. The consistency and reliability of different test software are obtained with the comparing results, which will guide users to select a suitable product.

Paper Details

Date Published: 14 July 2015
PDF: 11 pages
Proc. SPIE 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers, 95322A (14 July 2015); doi: 10.1117/12.2186267
Show Author Affiliations
Renhui Guo, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Chao Jiang, Nanjing Univ. of Science and Technology (China)
Hui Cao, Nanjing Univ. of Science and Technology (China)
Huiqin Zhang, Nanjing Univ. of Science and Technology (China)
Binbin Zhou, Nanjing Univ. of Science and Technology (China)
Le Song, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 9532:
Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers
Jianda Shao; Takahisa Jitsuno; Wolfgang Rudolph; Meiping Zhu, Editor(s)

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