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Proceedings Paper

Adaptive optics at the angstrom scale: from discrete to continuous surface manipulation
Author(s): Benjamin J. Wylie-van Eerd; Bram Krijnen; Fred Bijkerk; Guus J. H. M. Rijnders; Eric Louis
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Paper Details

Date Published:
Proc. SPIE 9588, Advances in X-Ray/EUV Optics and Components X, 958809; doi: 10.1117/12.2186156
Show Author Affiliations
Benjamin J. Wylie-van Eerd, Univ. Twente (Netherlands)
Bram Krijnen, DEMCON (Netherlands)
Fred Bijkerk, Univ. Twente (Netherlands)
Guus J. H. M. Rijnders, Univ. Twente (Netherlands)
Eric Louis, Univ. Twente (Netherlands)

Published in SPIE Proceedings Vol. 9588:
Advances in X-Ray/EUV Optics and Components X
Shunji Goto; Christian Morawe; Ali M. Khounsary, Editor(s)

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