Share Email Print
cover

Proceedings Paper

Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes
Author(s): Zhaozhao Zhu; Trent Mankowski; Kaushik Balakrishnan; Ali Sehpar Shikoh; Farid Touati; Mohieddine A. Benammar; Masud Mansuripur; Charles M. Falco
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Zinc oxide and aluminum/gallium-doped zinc oxide thin films were deposited via sol-gel spin-coating technique. Employing plasma treatment as alternative to post thermal annealing, we found that the morphologies of these thin films have changed and the sheet resistances have been significantly enhanced. These plasma-treated thin films also show very good optical properties, with transmittance above 90% averaged over the visible wavelength range. Our best aluminum/gallium-doped zinc oxide thin films exhibit sheet resistances (Rs) of ~ 200 Ω/sq and ~ 150 Ω/sq, respectively.

Paper Details

Date Published: 5 September 2015
PDF: 5 pages
Proc. SPIE 9561, Thin Films for Solar and Energy Technology VII, 956109 (5 September 2015); doi: 10.1117/12.2186144
Show Author Affiliations
Zhaozhao Zhu, College of Optical Sciences, The Univ. of Arizona (United States)
Trent Mankowski, College of Optical Sciences, The Univ. of Arizona (United States)
Kaushik Balakrishnan, College of Optical Sciences, The Univ. of Arizona (United States)
Ali Sehpar Shikoh, Qatar Univ. (Qatar)
Farid Touati, Qatar Univ. (Qatar)
Mohieddine A. Benammar, Qatar Univ. (Qatar)
Masud Mansuripur, College of Optical Sciences, The Univ. of Arizona (United States)
Charles M. Falco, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 9561:
Thin Films for Solar and Energy Technology VII
Louay A. Eldada; Michael J. Heben, Editor(s)

© SPIE. Terms of Use
Back to Top