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Proceedings Paper

Method for traceable resolution calibration of the laser feedback displacement sensor
Author(s): Yingchun Ding; Runtao Tan; Yidong Tan; Shulian Zhang
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Paper Abstract

A method is presented in this paper for resolution calibration of the laser feedback displacement sensor based on Fabry-Perot (F-P) high-order feedback cavity using a conventional feedback system to measure the same displacement with it simultaneously. By calibrating the ratio of the intensity modulated curves gotten by this two different systems, the accurate optical resolution of the integrated system can be obtained. Without using any other subdivision method, the optical resolution can be about 11nm, which is traceable to light wavelength. By adding 20 times electric subdivision, the final resolution of this system is about 0.55nm. The integrated system can fit the requirement of the industrial application, and can also be used for nanometrology.

Paper Details

Date Published: 17 July 2015
PDF: 7 pages
Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95240H (17 July 2015); doi: 10.1117/12.2186135
Show Author Affiliations
Yingchun Ding, Beijing Univ. of Chemical Technology (China)
Runtao Tan, Beijing Univ. of Chemical Technology (China)
Tsinghua Univ. (China)
Yidong Tan, Tsinghua Univ. (China)
Shulian Zhang, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 9524:
International Conference on Optical and Photonic Engineering (icOPEN 2015)
Anand K. Asundi; Yu Fu, Editor(s)

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