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Proceedings Paper

White light single-shot interferometry with colour CCD camera for optical inspection of microsystems
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Paper Abstract

White light interferometry is a well-established optical tool for surface metrology of reflective samples. In this work, we discuss a single-shot white light interferometer based on single-chip color CCD camera and Hilbert transformation. The approach makes the measurement dynamic, faster, easier and cost-effective for industrial applications. Here we acquire only one white light interferogram using colour CCD camera and then decompose into its individual components using software. We present a simple Hilbert transformation approach to remove the non-uniform bias associated with the interference signal. The phases at individual wavelengths are calculated using Hilbert transformation. The use of Hilbert transformation introduces phase error which depends on number of fringe cycles. We discuss these errors. Experimental results on reflective micro-scale-samples for surface profiling are presented.

Paper Details

Date Published: 17 July 2015
PDF: 8 pages
Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95240C (17 July 2015); doi: 10.1117/12.2185802
Show Author Affiliations
Paul Kumar Upputuri, Nanyang Technological Univ. (Singapore)
Manojit Pramanik, Nanyang Technological Univ. (Singapore)
Krishna Mohan Nandigana, Indian Institute of Technology Madras (India)
Mahendra Prasad Kothiyal, Indian Institute of Technology Madras (India)

Published in SPIE Proceedings Vol. 9524:
International Conference on Optical and Photonic Engineering (icOPEN 2015)
Anand K. Asundi; Yu Fu, Editor(s)

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