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Proceedings Paper

Influence of quantized diffractive phase element on the axial uniformity of pseudo-nondiffracting beams
Author(s): Jyh-Rou Sze; An-Chi Wei; Wen-Hong Wu; Chun-Li Chang
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Paper Abstract

The analysis of the diffractive phase elements (DPEs) that synthesizes pseudo-nondiffracting beams (PNDBs) in different axial regions are described. Those elements are designed by using conjugate-gradient method algorithm. To meet the requirement of lithography fabrication process, the obtained optimum continuous surface profile of DPEs must be quantized in the multilevel structure. In order to analyze the impact of different quantization levels, the axial-illuminance RMS variance of PNDBs for each quantized DPE is calculated and compared with each other. The compared results show that the axial illuminance of the PNDB of DPE with smaller-levels quantization fluctuates more rapidly than that of DPE with larger-levels quantization. Meanwhile, the analyses also show that the axial uniformity of the PNDB of DPE with a longer focal length is less sensitive to the quantization level.

Paper Details

Date Published: 17 July 2015
PDF: 7 pages
Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 95240B (17 July 2015); doi: 10.1117/12.2185700
Show Author Affiliations
Jyh-Rou Sze, Instrument Technology Research Ctr. (Taiwan)
An-Chi Wei, National Central Univ. (Taiwan)
Wen-Hong Wu, Instrument Technology Research Ctr. (Taiwan)
Chun-Li Chang, Instrument Technology Research Ctr. (Taiwan)

Published in SPIE Proceedings Vol. 9524:
International Conference on Optical and Photonic Engineering (icOPEN 2015)
Anand K. Asundi; Yu Fu, Editor(s)

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