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Proceedings Paper

Investigation of electron beam irradiation effect on pore formation
Author(s): Seong Soo Choi; Myoung Jin Park; Chul Hee Han; Sung In Kim; Jung Ho Yoo; Kyung Jin Park; Nam Kyou Park; Yong-Sang Kim
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Paper Abstract

There have been tremendous interests about the fabrication of the Au plasmonic nanopore due to its capability of the nanosize optical biosensor. We have investigated the influence of low energy electron beam irradiation on an Au nanomembrane during Au nanopore formation. In this report, the influence of electron beam irradiation on the Au nanopore formation will be reported. The nanopores on the 200 nm thick Au membrane were initially fabricated using focused ion beam (FIB) and high energy electron beam techniques such as transmission electron microscopy (TEM), and field emission scanning electron microscopy (FESEM). During high energy electron beam by using TEM, either a "shrinking" or a "opening" phenomenon is reported dependent on the ratio of thickness to aperture diameter. However, for a FESEM electron beam irradiation, a shrinking phenomenon is always observed. In this report, the nanopore formation during FESEM electron beam irradiation will be reported depending upon energy absorption and thermal diffusivity.

Paper Details

Date Published: 21 October 2015
PDF: 7 pages
Proc. SPIE 9636, Scanning Microscopies 2015, 96360B (21 October 2015); doi: 10.1117/12.2185519
Show Author Affiliations
Seong Soo Choi, Sun Moon Univ. (Korea, Republic of)
Myoung Jin Park, Sun Moon Univ. (Korea, Republic of)
Chul Hee Han, Sun Moon Univ. (Korea, Republic of)
Sung In Kim, National Nanofab Ctr. (Korea, Republic of)
Jung Ho Yoo, National Nanofab Ctr. (Korea, Republic of)
Kyung Jin Park, National Nanofab Ctr. (Korea, Republic of)
Nam Kyou Park, Seoul National Univ. (Korea, Republic of)
Yong-Sang Kim, Sungkyunkwan Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 9636:
Scanning Microscopies 2015
Michael T. Postek; Dale E. Newbury; S. Frank Platek; Tim K. Maugel, Editor(s)

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