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Proceedings Paper

Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes
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Paper Abstract

This work reports on the development of a binary pseudo-random test sample optimized to calibrate the MTF of optical microscopes. The sample consists of a number of 1-D and 2-D patterns, with different minimum sizes of spatial artifacts from 300 nm to 2 microns. We describe the mathematical background, fabrication process, data acquisition and analysis procedure to return spatial frequency based instrument calibration. We show that the developed samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error.

Paper Details

Date Published: 1 September 2015
PDF: 7 pages
Proc. SPIE 9576, Applied Advanced Optical Metrology Solutions, 957608 (1 September 2015); doi: 10.1117/12.2185191
Show Author Affiliations
Ian Lacey, Lawrence Berkeley National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
Nikolay A. Artemiev, Lawrence Berkeley National Lab. (United States)
Sergey Babin, aBeam Technologies, Inc. (United States)
Stefano Cabrini, Lawrence Berkeley National Lab. (United States)
Guiseppe Calafiore, aBeam Technologies, Inc. (United States)
Elaine R. Chan, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Christophe Peroz, aBeam Technologies, Inc. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 9576:
Applied Advanced Optical Metrology Solutions
Erik Novak; James D. Trolinger, Editor(s)

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