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Proceedings Paper

Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard
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Paper Abstract

We propose an in situ method for establishing the amplification coefficient (height scale) for an interference microscope as an alternative to the traditional step height standard technique for routine calibration. The method begins by determining the properties of the microscope illuminator equipped with a narrow-band spectral filter, using a spectrometer to provide traceability to the 546.074nm 198Hg line. A data acquisition with the interference microscope links this wavelength standard to a calibration of the properties of the optical path length scanning mechanism of the interferometer. A capacitance sensor in the scanner maintains this calibration for subsequent measurements. A targeted k=1 uncertainty of 0.1% is favorable when compared to calibration using physical artifacts, and the calibration procedure is easier to perform and less sensitive to operator error.

Paper Details

Date Published: 21 June 2015
PDF: 11 pages
Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952610 (21 June 2015); doi: 10.1117/12.2184975
Show Author Affiliations
Peter de Groot, Zygo Corp. (United States)
Jake Beverage, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 9526:
Modeling Aspects in Optical Metrology V
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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