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Proceedings Paper

Electrospray ionization deposition of BSA under vacuum conditions
Author(s): Dominic Hecker; Daniel Gloess; Peter Frach; Gerald Gerlach
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Paper Abstract

Vacuum deposition techniques like thermal evaporation and CVD with their precise layer control and high layer purity often cannot be applied for the deposition of chemical or biological molecules. The molecules are usually decomposed by heat. To overcome this problem, the Electrospray ionization (ESI) process known from mass spectroscopy is employed to transfer molecules into vacuum and to deposit them on a substrate. In this work, a homemade ESI tool was used to deposit BSA (Bovine serum albumin) layers with high deposition rates. Solutions with different concentrations of BSA were prepared using a methanol:water (MeOH:H2O) mixture (1:1) as solvent. The influence of the substrate distance on the deposition rate and on the transmission current was analyzed. Furthermore, the layer thickness distribution and layer adhesion were investigated.

Paper Details

Date Published: 1 June 2015
PDF: 5 pages
Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 951729 (1 June 2015); doi: 10.1117/12.2184807
Show Author Affiliations
Dominic Hecker, Technische Univ. Dresden (Germany)
Daniel Gloess, Fraunhofer Institute for Organic Electronics (Germany)
Peter Frach, Fraunhofer Institute for Organic Electronics (Germany)
Gerald Gerlach, Technische Univ. Dresden (Germany)


Published in SPIE Proceedings Vol. 9517:
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
José Luis Sánchez-Rojas; Riccardo Brama, Editor(s)

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