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Proceedings Paper

Spatial mode projection for side-wall angle measurements
Author(s): L. Cisotto; Yan Zhu; S. F. Pereira; H. P. Urbach
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Paper Abstract

Finding a fast and precise method to measure the side-wall angle of periodic (or non-periodic) structures is still a very challenging problem in lithographic applications. For this reason, over the years, many techniques have been proposed to circumvent this limitation, with the final goal to give the most precise geometrical description of particular targets. Recently, the investigation of the optical angular momentum, which is encoded in the light's spiral spectrum, has brought new ways to acquire information about objects. In this work, we built an optical setup to put forward a new method to detect the side-wall angle in a fast and reliable way. The novelty of this work is the use of the spiral spectrum of a light beam for angle measurements, i.e. the light transmitted by a particular structure is projected onto properly tailored spatial modes and only the most sensitive mode to the side wall angle is detected and processed.

Paper Details

Date Published: 21 June 2015
PDF: 8 pages
Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952607 (21 June 2015); doi: 10.1117/12.2184738
Show Author Affiliations
L. Cisotto, Technische Univ. Delft (Netherlands)
Yan Zhu, Technische Univ. Delft (Netherlands)
S. F. Pereira, Technische Univ. Delft (Netherlands)
H. P. Urbach, Technische Univ. Delft (Netherlands)


Published in SPIE Proceedings Vol. 9526:
Modeling Aspects in Optical Metrology V
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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