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Proceedings Paper

Aberration influence on accuracy of angle measurements by means of autocollimator
Author(s): Yuri V. Filatov; Roman A. Larichev
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Paper Abstract

Autocollimator’s principle of operation is regarded from the optical imaging point of view. The aberration influence on measurements is presented through both ray geometry and wave front approaches. The role of measurement setup properties is considered. Simulation and experimental results are presented to bring preliminary estimates.

Paper Details

Date Published: 22 June 2015
PDF: 7 pages
Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95253O (22 June 2015); doi: 10.1117/12.2184726
Show Author Affiliations
Yuri V. Filatov, Saint-Petersburg Electrotechnical Univ. "LETI" (Russian Federation)
Roman A. Larichev, Saint-Petersburg Electrotechnical Univ. "LETI" (Russian Federation)


Published in SPIE Proceedings Vol. 9525:
Optical Measurement Systems for Industrial Inspection IX
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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