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Proceedings Paper

Absolute interferometric calibration of cylindrical surfaces: experiments
Author(s): Karl-Edmund Elssner; Thomas Bluemel; Regina Burow; Ricarda Kafka; Guenter Schulz; Andreas Vogel
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Paper Abstract

Two methods of calibrating an interferometer for testing cylindrical surfaces are tested experimentally. One method uses a tilting mirror instead of the test specimen and combines at least two measurements at different angles. The other method adds together three measurements. In two of them a cylindrical specifmen is used. In the third one the specimen is replaced by a roof mirror. Results of both methods are computed. They show a reproducibility of (lambda) /50 and an accuracy of (lambda) /20 for the absolute surface deviations of a cylindrical specimen.

Paper Details

Date Published: 8 September 1995
PDF: 6 pages
Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218462
Show Author Affiliations
Karl-Edmund Elssner, Berliner Institut fuer Optik GmbH (Germany)
Thomas Bluemel, Berliner Institut fuer Optik GmbH (Germany)
Regina Burow, Berliner Institut fuer Optik GmbH (Germany)
Ricarda Kafka, Berliner Institut fuer Optik GmbH (Germany)
Guenter Schulz, Berliner Institut fuer Optik GmbH (Germany)
Andreas Vogel, Berliner Institut fuer Optik GmbH (Germany)


Published in SPIE Proceedings Vol. 2536:
Optical Manufacturing and Testing
Victor J. Doherty D.V.M.; H. Philip Stahl, Editor(s)

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