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Proceedings Paper

Investigation on measurement of mid-frequency wavefront error for large optics in high-power laser system
Author(s): Shijie Liu; Chunxiang Jin; You Zhou; Yunbo Bai; Yuanan Zhao; Kui Yi; Jianda Shao
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Paper Abstract

In this paper, we extended the measurement method of mid-frequency wavefront error to spherical and aspherical components. Some influence factors like the system error of interferometer, environment variation, surface parallelism of optics, polarizations of interferometer illumination, and the wavefront distribution of optics are analyzed in detail. Some optimized measurement strategies for different kinds of optics are suggested. Finally, experimental measurements on flat optics, spherical and aspherical optics are performed to testify the suggested measurement methods, respectively.

Paper Details

Date Published: 22 June 2015
PDF: 11 pages
Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 952536 (22 June 2015); doi: 10.1117/12.2184586
Show Author Affiliations
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Chunxiang Jin, Shanghai Institute of Optics and Fine Mechanics (China)
You Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Yunbo Bai, Shanghai Institute of Optics and Fine Mechanics (China)
Yuanan Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 9525:
Optical Measurement Systems for Industrial Inspection IX
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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