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Proceedings Paper

Improvement in topology measurement accuracy of atomic force microscope using additional sensor
Author(s): Yeomin Yoon; Jiseong Jeong; Junsup Kim; Kyihwan Park
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Paper Abstract

The topology image of an atomic force microscope is obtained by picking up a controlled output of a force-feedback loop that is proportional to the height of a sample under the assumption that no dynamics in a z-axis actuator exist. However, the dynamic effects such as hysteresis and creep in a PZT driving z-axis actuator cannot be ignored. To solve this problem, a strain-gage sensor is used as an additional sensor, which enables measurement of the absolute displacement of a z-axis PZT nano scanner. The advantage of using an additional sensor is experimentally provided and validated in topology images.

Paper Details

Date Published: 1 July 2015
PDF: 4 pages
Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 96550K (1 July 2015); doi: 10.1117/12.2184430
Show Author Affiliations
Yeomin Yoon, Gwangju Institute of Science and Technology (Korea, Republic of)
Jiseong Jeong, Gwangju Institute of Science and Technology (Korea, Republic of)
Junsup Kim, Gwangju Institute of Science and Technology (Korea, Republic of)
Kyihwan Park, Gwangju Institute of Science and Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 9655:
Fifth Asia-Pacific Optical Sensors Conference
Byoungho Lee; Sang-Bae Lee; Yunjiang Rao, Editor(s)

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