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Proceedings Paper

Quality assessment of engineering surfaces by infrared scattering
Author(s): Mans Bjuggren; Laurent Krummenacher; Lars H. Mattsson
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Paper Abstract

The prevailing technique for assessing surface roughness and related parameters from engineering surfaces in industry is mechanical stylus profilometry. Though it is a conceptually direct method it suffers from several drawbacks; the measurement is not area-covering while many important features of engineering surfaces are related to 3D topography; the technique is slow; and, the technique involves contact with the surface, potentially damaging it. For surfaces of optical quality, elastic light scattering provides an efficient way of characterizing surfaces, and two ASTM standards exist pertaining to such measurements. However, the theoretical models based on first order perturbation theory break down when the rms roughness approaches one tenth of the incident wavelength. We have used infrared scattering at 10.6 micrometers wavelength to provide area-covering, non-contact surface characterization of engineering surfaces. The surface power spectral density is calculated from the scattering distribution by Rayleigh-Rice vector perturbation theory. Measurement of bandwidth limited surface roughness is demonstrated for ground and polished surfaces in the root mean square roughness range of 0.03 micrometers to 1.7 micrometers . Good correlation with contact stylus measurements is achieved for nearly 1D surfaces, anisotropic surfaces, and isotropic surfaces. Measurement of scratch and lay characteristics are also demonstrated.

Paper Details

Date Published: 8 September 1995
PDF: 10 pages
Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218439
Show Author Affiliations
Mans Bjuggren, Institute of Optical Research (Sweden)
Laurent Krummenacher, Institute of Optical Research (Sweden)
Lars H. Mattsson, Institute of Optical Research (Sweden)


Published in SPIE Proceedings Vol. 2536:
Optical Manufacturing and Testing
Victor J. Doherty; H. Philip Stahl, Editor(s)

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