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Proceedings Paper

Edge control in computer-controlled optical polishing
Author(s): Xuejun Zhang; Jingchi Yu; Xiafei Sun; Zhongyu Zhang
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Paper Abstract

In this paper, edge control algorithm is studied based on a modified removal function, a computer simulation program is written to provide information on edge figuring process. The reliability of the algorithm is confirmed by CCP polishing experiment. The experimental results appear to have good agreement with theoretical analysis, spherical surface with edge errors of 2.56(lambda) P-V ((lambda) equals 6328 angstrom) is polished for 1.5h, and the errors reduce to 0.89(lambda) P-V.

Paper Details

Date Published: 8 September 1995
PDF: 8 pages
Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218435
Show Author Affiliations
Xuejun Zhang, Changchun Institute of Optics and Fine Mechanics (China)
Jingchi Yu, Changchun Institute of Optics and Fine Mechanics (China)
Xiafei Sun, Changchun Institute of Optics and Fine Mechanics (China)
Zhongyu Zhang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2536:
Optical Manufacturing and Testing
Victor J. Doherty; H. Philip Stahl, Editor(s)

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