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Proceedings Paper

Rapidly renewable polishing lap
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Paper Abstract

Textured laps can be created by 'slumping' uniform thin films of appropriate materials over textured substrates that have been generated to the required figure. The film can easily be replaced and the lap shape is invariant since the lap substrate never contacts the workpiece nor the polishing compound. Thus extremely repeatable lapping and polishing processes are obtained. This paper introduces this approach to lap construction and presents preliminary results.

Paper Details

Date Published: 8 September 1995
PDF: 8 pages
Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218429
Show Author Affiliations
Christopher J. Evans, National Institute of Standards and Technology (United States)
Robert E. Parks, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 2536:
Optical Manufacturing and Testing
Victor J. Doherty; H. Philip Stahl, Editor(s)

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