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Proceedings Paper

Planar waveguide Michelson interferometer fabricated by using 157nm mask laser micromachining
Author(s): Haihong Bao; Zengling Ran; Xuezhong Wu; Ke Yang; Yuan Jiang; Yunjiang Rao
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Paper Abstract

A Michelson interferometer is fabricated on silica planar waveguide by using the one-step technology based on 157nm mask laser micromachining. The fabrication time for one device is ~10s. Experimental results show that such an interferometer has an excellent fringe contrast of >20dB. Its temperature and refractive index (RI) responses are tested by observing the wavelength shift of the interferometric fringes, which shows linear characteristics with a thermo-coefficient of ~9.5pm/°C and a RI-coefficient of ~36.7nm/RIU, respectively. The fabrication technology may pave a new way for direct writing of planar silica waveguide devices for sensing applications with high efficiency and quality.

Paper Details

Date Published: 1 July 2015
PDF: 4 pages
Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 965531 (1 July 2015); doi: 10.1117/12.2184265
Show Author Affiliations
Haihong Bao, Univ. of Electronic Science and Technology of China (China)
Zengling Ran, Univ. of Electronic Science and Technology of China (China)
Xuezhong Wu, Univ. of Electronic Science and Technology of China (China)
Ke Yang, Univ. of Electronic Science and Technology of China (China)
Yuan Jiang, Univ. of Electronic Science and Technology of China (China)
Yunjiang Rao, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 9655:
Fifth Asia-Pacific Optical Sensors Conference
Byoungho Lee; Sang-Bae Lee; Yunjiang Rao, Editor(s)

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