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Proceedings Paper

Analysis of the fundamental measuring error of aspherical surface by shearing interferometer
Author(s): Qiming Xin; Yun Gao; Yuanhui Zeng
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Paper Abstract

In the methods to test an asperhical optical surface, sheering interferometer is a testing instrument by which the wavefront of the surface testing is split apart into two and then interference fringes can be formed without demanding a standard reference aspherical wavefront. However, if the sheering interferometer is applied to test an aspehrical surface, having a relatively big deviation from its best fit spherical surface, the fundamental measuring error will increase very quickly. A comprehensive analysis of this error is given and an improved method is put forward by which the testing scale of the sheering interferometer is enlarged by introducing an analogue standard wavefront produced by a computer so as to reduce error resources and to improve the testing accuracy.

Paper Details

Date Published: 8 September 1995
PDF: 6 pages
Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218417
Show Author Affiliations
Qiming Xin, Beijing Institute of Technology (China)
Yun Gao, Beijing Institute of Technology (China)
Yuanhui Zeng, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 2536:
Optical Manufacturing and Testing
Victor J. Doherty D.V.M.; H. Philip Stahl, Editor(s)

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