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Proceedings Paper

Combining ion figuring and SPSI testing to produce a high-quality aspheric 18-inch-diameter f/2 mirror
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Paper Abstract

Ion figuring is an efficient and deterministic process for fabricating high quality optical surfaces. The simultaneous phase shifting interferometer is a helium-neon laser-based Twyman-Green system capable of data acquisition at shutter speeds of up to 1/10,000th of a second, which eliminates vibration effects. Ion figuring and simultaneous phase shifting interferometry were successfully combined to produce an aspheric, 18 inch diameter, f/2, ULE mirror of exceptional surface figure quality. Through iterative cycles of SPSI testing and ion figuring, the mirror surface was processed to a final figure quality of 0.007 (lambda) rms (95% of data <EQ 0.028 (lambda) p-v). The radius of curvature of the mirror was held to within 0.00008 inch of the design radius. Details of the testing/figuring cycles are discussed along with information regarding the mirror mounting scheme, interferometer calibration, and data analysis techniques.

Paper Details

Date Published: 8 September 1995
PDF: 10 pages
Proc. SPIE 2536, Optical Manufacturing and Testing, (8 September 1995); doi: 10.1117/12.218411
Show Author Affiliations
Frank A. Carbone, Eastman Kodak Co. (United States)
David A. Markle, Ultratech Stepper, Inc. (United States)


Published in SPIE Proceedings Vol. 2536:
Optical Manufacturing and Testing
Victor J. Doherty; H. Philip Stahl, Editor(s)

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