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Proceedings Paper

Overview of characterization and metrology techniques for microlenses and microlens arrays
Author(s): Myun-Sik Kim; Lisa Allegre; Jonathan Sunarjo; Wilfried Noell; Reinhard Voelkel
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Paper Abstract

We review various metrology techniques for the characterization of refractive microlenses and microlens arrays (MLAs). The limitations and strength of each technique are analyzed. The goal is to obtain more stable and repeatable metrology routines for micro-optics manufacturing. This analysis comprises both techniques for the characterization of individual microlenses and the analysis of a very large number of microlenses in array configurations. Metrology of spherical and aspherical lens profiles, surface properties, aberrations, Strehl ratio, and focal properties will be presented.

Paper Details

Date Published: 22 June 2015
PDF: 8 pages
Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95251D (22 June 2015); doi: 10.1117/12.2183692
Show Author Affiliations
Myun-Sik Kim, SUSS MicroOptics SA (Switzerland)
Lisa Allegre, SUSS MicroOptics SA (Switzerland)
Jonathan Sunarjo, SUSS MicroOptics SA (Switzerland)
Wilfried Noell, SUSS MicroOptics SA (Switzerland)
Reinhard Voelkel, SUSS MicroOptics SA (Switzerland)


Published in SPIE Proceedings Vol. 9525:
Optical Measurement Systems for Industrial Inspection IX
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves, Editor(s)

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