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Proceedings Paper

Extreme ultraviolet scatter from particulate-contaminated mirrors
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Paper Abstract

The BRDF of a MgF2 protected Al mirror contaminated with dust particulates due to exposure to the laboratory environment has been measured and is presented for wavelengths of 633 nm, 325 nm, 121.6 nm, and 74 nm. This experimental data is compared with theoretical predictions arising from the OPALS modeling software. This model calculates the BRDF based on the measured particlate distribution found on the surface, and the optical constants of the contaminant. The OPALS software shows promise as a useful tool in the design phase of optical instruments: for drawing up contamination budgets and for incorporation into stray light analysis predicting instrument performance.

Paper Details

Date Published: 1 September 1995
PDF: 12 pages
Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); doi: 10.1117/12.218335
Show Author Affiliations
Michael Phillip Newell, NASA Goddard Space Flight Ctr. (United States)
Laura A. Whitlock, NASA Goddard Space Flight Ctr. (United States)
Ritva A. M. Keski-Kuha, NASA Goddard Space Flight Ctr. (United States)
John Larkin Jackson, New Renaissance Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 2541:
Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries
John C. Stover, Editor(s)

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