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Proceedings Paper

Multiple particle technique for determination of differential scattering cross section of very small surface bound particles
Author(s): John C. Stover; Marvin L. Bernt
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Paper Abstract

Measurement of small particle contamination, via laser particle scanners, is an important tool for maximizing throughput in semiconductor production lines. As line widths shrink, the required minimum observable particle diameter drops in proportion. Unfortunately, the scatter signal from a small particle on a surface falls off very quickly with decreased diameter, even faster than would be predicted by a simple Rayleigh scatter model of an isolated particle. This paper reviews a technique to measure the differential scattering cross-section of very small surface bound particles. The objective is to provide a means of obtaining data for producing the next generation of particle scanners.

Paper Details

Date Published: 1 September 1995
PDF: 5 pages
Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); doi: 10.1117/12.218326
Show Author Affiliations
John C. Stover, The Scatter Works, Inc. (United States)
Marvin L. Bernt, Schmitt Measurement Systems, Inc. (United States)

Published in SPIE Proceedings Vol. 2541:
Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries
John C. Stover, Editor(s)

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