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Proceedings Paper

In process metrology of aspheric optical surfaces during sub-aperture polishing process
Author(s): L. M. Pant; M. P. Singh; K. K. Pant; A. Ghosh
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Paper Abstract

The fabrication of complex aspheric and freeform surfaces are possible with accurate iterative metrology feedback during correcting polishing process. The tool path of the machine is generated based on the measured surface data for corrective material removal. The computer controlled polishing machines are compatible with various metrology tools. This paper presents annular null based interferometric in- process metrology for deterministic corrective polishing for aspheric surface of infrared optical material.

Paper Details

Date Published: 15 June 2015
PDF: 6 pages
Proc. SPIE 9654, International Conference on Optics and Photonics 2015, 96540U (15 June 2015); doi: 10.1117/12.2182846
Show Author Affiliations
L. M. Pant, Instruments Research & Development Establishment (India)
M. P. Singh, Instruments Research & Development Establishment (India)
K. K. Pant, Instruments Research & Development Establishment (India)
A. Ghosh, Instruments Research & Development Establishment (India)


Published in SPIE Proceedings Vol. 9654:
International Conference on Optics and Photonics 2015
Kallol Bhattacharya, Editor(s)

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