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Proceedings Paper

Pyroelectric linear array infrared sensors made of La-modified PbTiO3 thin films and their applications
Author(s): Satoru Fujii; Takeshi Kamata; Shigenori Hayashi; Yoshihiro Tomita; Ryoichi Takayama; Takashi Hirao; Tatsuo Nakayama; Takashi Deguchi
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Paper Abstract

A new pyroelectric linear array IR sensor has been developed by using the c-axis oriented La- modified PbTiO3 (PLT:Pb1-xLaxTi1-x/4O3) thin films. The PLT thin films were prepared on (100) MgO single crystal substrates by rf-magnetron sputtering method. Without a poling treatment, this PLT thin film has high pyroelectric properties (x equals 0.1; PL10, (epsilon) r equals 200, pyroelectric coefficient: (gamma) equals 5.5 X 10-8 C/cm2K). For minimizing the substantial heat capacity, these IR sensors have a unique structure in which eight elements of pyroelectric thin films are supported only by polyimide resin films (thickness equals 3 micrometer). This sensor was fabricated by etching MgO substrates off thoroughly. These IR sensors have a high specific detectivity D*(500,30,1) of 3.5 X 108 cmHz1/2/W. A new compact IR sensing system using this linear array sensor can measure thermal distribution (8 X 64) by horizontal sweeping of the vertical linear array elements. The image processing with neural network concept makes possible high-accuracy using a few data from the sensor elements. This sensor system is applied to a new type of room air conditioners to improve the comfort level control.

Paper Details

Date Published: 8 September 1995
PDF: 10 pages
Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); doi: 10.1117/12.218262
Show Author Affiliations
Satoru Fujii, Matsushita Electric Industrial Co., Ltd. (Japan)
Takeshi Kamata, Matsushita Electric Industrial Co., Ltd. (Japan)
Shigenori Hayashi, Matsushita Electric Industrial Co., Ltd. (Japan)
Yoshihiro Tomita, Matsushita Electric Industrial Co., Ltd. (Japan)
Ryoichi Takayama, Matsushita Electric Industrial Co., Ltd. (Japan)
Takashi Hirao, Matsushita Technoresearch, Inc. (Japan)
Tatsuo Nakayama, Matsushita Electric Industrial Co., Ltd. (Japan)
Takashi Deguchi, Matsushita Electric Industrial Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 2552:
Infrared Technology XXI
Bjorn F. Andresen; Marija Strojnik, Editor(s)

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