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Proceedings Paper

Micromachined infrared detectors based on pyroelectric thin films
Author(s): Dennis L. Polla; P. F. Baude; Linda Pham; Q. Mei; J. R. Choi; Chian-Ping Ye; L. F. Francis; Tho Truong Vu
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Paper Abstract

Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO(subscript 3/ and other related Perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.

Paper Details

Date Published: 8 September 1995
PDF: 10 pages
Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); doi: 10.1117/12.218259
Show Author Affiliations
Dennis L. Polla, Univ. of Minnesota/Twin Cities (United States)
P. F. Baude, Univ. of Minnesota/Twin Cities (United States)
Linda Pham, Univ. of Minnesota/Twin Cities (United States)
Q. Mei, Univ. of Minnesota/Twin Cities (United States)
J. R. Choi, Univ. of Minnesota/Twin Cities (United States)
Chian-Ping Ye, Univ. of Minnesota/Twin Cities (United States)
L. F. Francis, Univ. of Minnesota/Twin Cities (United States)
Tho Truong Vu, Univ. of Minnesota/Twin Cities and Top-Vu Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 2552:
Infrared Technology XXI
Bjorn F. Andresen; Marija Strojnik, Editor(s)

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