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Proceedings Paper

Experimental studies of an ablation plasma for laser micromachining of the MEMS elements
Author(s): Mateusz Tański; Robert Barbucha; Marek Kocik
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Paper Details

Date Published:
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Proc. SPIE 9518, Bio-MEMS and Medical Microdevices II, 95180S; doi: 10.1117/12.2182424
Show Author Affiliations
Mateusz Tański, The Szewalski Institute of Fluid-Flow Machinery (Poland)
Robert Barbucha, The Szewalski Institute of Fluid-Flow Machinery (Poland)
Marek Kocik, The Szewalski Institute of Fluid-Flow Machinery (Poland)


Published in SPIE Proceedings Vol. 9518:
Bio-MEMS and Medical Microdevices II
Sander van den Driesche, Editor(s)

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