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Proceedings Paper

Measurement of manufacturing resolution for two photon polymerization structures with different manufacturing parameters
Author(s): Tien-Tung Chung; Wan-Jou Li; Sheng-Yuan Chen; Chi-Hou Hoi
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Paper Abstract

This paper studied manufacturing resolutions of micro structures made by two photon polymerization (TPP) technology with different manufacturing parameters. The light source used for the TPP manufacturing system was a low-cost 532 nm Nd:YAG green laser, and the material used was commercial resin Photomer 3015. Two objective lenses, one with magnification of 100 times (100x) and numerical aperture (NA) of 1.3 and the other with 50x and NA0.8 were used in TPP production. The manufacturing resolution, which is also named as voxel size, changed with different manufacturing parameters such as laser power and exposure time. The measurement results of TPP structures manufactured with different manufacturing parameters indicated that the minimum line width produced by the 100x-NA1.3 lens could be reduced down to 67 nanometer (nm), which was quite good for TPP systems with low-cost Nd:YAG laser.

Paper Details

Date Published: 6 March 2015
PDF: 7 pages
Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 944651 (6 March 2015); doi: 10.1117/12.2182421
Show Author Affiliations
Tien-Tung Chung, National Taiwan Univ. (Taiwan)
Wan-Jou Li, National Taiwan Univ. (Taiwan)
Sheng-Yuan Chen, National Taiwan Univ. (Taiwan)
Chi-Hou Hoi, National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 9446:
Ninth International Symposium on Precision Engineering Measurement and Instrumentation
Junning Cui; Jiubin Tan; Xianfang Wen, Editor(s)

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