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Proceedings Paper

SMI: a new method to allow low cost, high resolution micro-machining using UV solid state lasers
Author(s): David Milne; David Myles; Phil Rumsby
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Paper Abstract

A new solid state laser based mask projection technique for micro-structuring materials is introduced and results obtained with a pilot system are shown. Details of the proposed architecture of production tools using the new technology are given. Advantages of the new method over conventional excimer laser based mask projection systems are summarized.

Paper Details

Date Published: 1 July 2015
PDF: 7 pages
Proc. SPIE 9657, Industrial Laser Applications Symposium (ILAS 2015), 96570F (1 July 2015); doi: 10.1117/12.2182410
Show Author Affiliations
David Milne, M-Solv Ltd. (United Kingdom)
David Myles, M-Solv Ltd. (United Kingdom)
Phil Rumsby, M-Solv Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 9657:
Industrial Laser Applications Symposium (ILAS 2015)
Mike Green; Cath Rose, Editor(s)

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